The laser-induced damage threshold (LIDT) of plate laser beam splitter (PLBS) coatings is closely related to the subsurface absorption defects of the substrate. Herein, a two-step deposition temperature method is proposed to understand the effect of substrate subsurface impurity defects on the LIDT of PLBS coatings. Firstly, BK7 substrates are heat-treated at three different temperatures. The surface morphology and subsurface impurity defect distribution of the substrate before and after the heat treatment are compared. Then, a PLBS coating consisting of alternating HfO₂–Al₂O₃ mixture and SiO₂ layers is designed to achieve a beam-splitting ratio (transmittance to reflectance, s-polarized light) of approximately 50:50 at 1053 nm and an angle of incidence of 45°, and it is prepared under four different deposition processes. The experimental and simulation results show that the subsurface impurity defects of the substrate migrate to the surface and accumulate on the surface during the heat treatment, and become absorption defect sources or nodule defect seeds in the coating, reducing the LIDT of the coating. The higher the heat treatment temperature, the more evident the migration and accumulation of impurity defects. A lower deposition temperature (at which the coating can be fully oxidized) helps to improve the LIDT of the PLBS coating. When the deposition temperature is 140°C, the LIDT (s-polarized light, wavelength: 1064 nm, pulse width: 9 ns, incident angle: 45°) of the PLBS coating is 26.2 J/cm², which is approximately 6.7 times that of the PLBS coating deposited at 200°C. We believe that the investigation into the laser damage mechanism of PLBS coatings will help to improve the LIDT of coatings with partial or high transmittance at laser wavelengths.

Various coatings in high-power laser facilities suffer from laser damage due to nodule defects. We propose a nodule dome removal (NDR) strategy to eliminate unwanted localized electric-field (E-field) enhancement caused by nodule defects, thereby improving the laser-induced damage threshold (LIDT) of laser coatings. It is theoretically demonstrated that the proposed NDR strategy can reduce the localized E-field enhancement of nodules in mirror coatings, polarizer coatings and beam splitter coatings. An ultraviolet (UV) mirror coating is experimentally demonstrated using the NDR strategy. The LIDT is improved to about 1.9 and 2.2 times for the UV mirror coating without artificial nodules and the UV mirror coating with artificial nodule seeds with a diameter of 1000 nm, respectively. The NDR strategy, applicable to coatings prepared by different deposition methods, improves the LIDT of laser coating without affecting other properties, such as the spectrum, stress and surface roughness, indicating its broad applicability in high-LIDT laser coatings.

Different laminated structures of TiO2/SiO2 composite film were prepared via atomic layer deposition (ALD) on alumina substrates. The effect of the annealing temperature in the air on the surface morphologies, crystal structures, binding energies, and ingredient content of these films was investigated using X-ray diffraction, field emission scanning electron microscopy, and X-ray photoelectron spectroscopy. Results showed that the binding energy of Ti and Si increased with decrease of the Ti content, and the TiO2/SiO2 nanolaminated films exhibited a complex bonding structure. As the annealing temperature increased, the thickness of the nanolaminated films decreased, and the density and surface roughness increased. An increase in the crystallization temperature was proportional to the SiO2 content in TiO2/SiO2 composite film. The annealing temperature and thin thickness strongly affected the phase structure of the ALD TiO2 thin film. To be specific, the TiO2 thin film transformed into an anatase phase from an amorphous phase after an increase in the annealing temperature from 400°C to 550°C, and the TiO2 film exhibited an anatase phase until the annealing temperature reached 850°C, owing to its extremely small thickness. The annealing process caused the Al ions in the substrate to diffuse into the films and bond with O.

The requirements for dichroic laser mirrors continue to increase with the development of laser technology. The challenge of a dichroic laser mirror coating is to simultaneously obtain spectral performance with significantly different reflection or transmission properties as well as a high laser-induced damage threshold (LIDT) at two different wavelengths. Traditional dichroic laser mirrors composed of alternating high- and low-refractive-index pure materials often has difficulty achieving excellent spectral performance and high LIDTs at two wavelengths simultaneously. We propose to use a new design with mixture layers and sandwich-like-structure interfaces to meet the challenging requirements. An Al2O3-HfO2 mixture-based dichroic laser mirror, which can be used as a harmonic separator in a fusion-class laser or a pump/signal beam separator in a petawatt-class Ti-sapphire laser system, is experimentally demonstrated using e-beam deposition. The mixture-based dichroic mirror coating shows good spectral performance, fine mechanical property, low absorption, and high LIDT. For the s-polarized 7.7 ns pulses at a wavelength of 532 nm and the p-polarized 12 ns pulses at a wavelength of 1064 nm, the LIDTs are almost doubled. The excellent performance of this new design strategy with mixture layers and sandwich-like-structure interfaces suggests its wide applicability in high-performance laser coating.